Quartz

• QUARTZ (Quartz Glass, SiO2) is glass made of pure silicic acid (SiO2) and is made by dissolving high purity silicic acid of several hundred ppm or less at about 2,000°C or higher.
  The amount of metal impurities contained in QUARTZ is extremely small, and
  It is characterized by very high purity at least 10 ppm (1 in 100,000) and less than 10 ppm (1 in 100 million).

Characteristics of Materials

• · It passes light well and has good transmission characteristics in a wide wavelength range from ultraviolet to infrared rays as well as visible light.
• · It is made of SiO2 with high purity and contains only a small amount of metal impurities.
• · The temperature-resistant softening point is very high at 1700℃, so it can be used up to a high temperature of about 1000℃.
• · It's very stable and highly resistant to drugs.

Key applications

• · Using tools or consumables for process transmission of semiconductor wafer manufacturing processes
• · Small amounts of multi-variety customization based on equipment process type
• · Widely used in lighting, optics, fiber, etc
• · Insulators essential for special measuring instruments and communication instruments

product descriptions

a quartz tube
ALD / LPCVD / Diffusion process

pedestal
ALD / LPCVD / Diffusion process

bell jar
ALD / LPCVD / Diffusion process

flange
ALD / LPCVD / Diffusion process

ring type
ALD / LPCVD / Diffusion process

tank
ALD / LPCVD / Diffusion process

chanber
ALD / LPCVD / Diffusion process

accessory
ALD / LPCVD / Diffusion process

Etcher Parts Q'tz Ware Production Item for Semiconductor Equipment

• Quartz Ware Production for Wet Etcher (wet)

Equipments	ITEM	Types	Process
1) Wet Clean Station 2) Wet Clean Equipment (Wafer Size) 6", 8", 12"	Quartz Bathe	1) Single Bath 2) Double Bath 3) Hot QDR Bath 4) D.I Heating Bath 5) Over Flow Bath 6) Final Rinse Bath 7) H3PO4 Bath 8) Solvent Bath	1) Pre-Diffusion 2) Pre-CVD 3) Wet Strip
	Quartz Wafer Guide	1) Wafer Guide 2) Wafer Chuck 3) Robot Chuck
	Quartz Heater	1) In-Line Heater 2) Lamp Heater
	Quartz Insulator	1) Insulator Ring 2) Insulator Pipe
	Quartz Funnel	Funnel Quartz
	Others	1) Ashing Boat 2) Spacer Quartz Striper